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Overview
HPM18V is a vacuum Gauge with Diaphragm Protector, also called capacitive film gauge (CDG). Thisproduct uses a ceramic capacitive sensor as a sensitive element and uses a vacuumconnection to directly measure pressure. Its analog output signals such as 0-5 or 0-10VDC are proportional to the measured pressure and are not affected by the type and composition of the process gas. Ceramics have the characteristics of high elasticity, wear resistance, corrosion resistance, and fast heat dissipation, which makes the vacuum gauge have very good thermal stability and low temperature drift.
Application
Vacuum application
Laboratory and research and development
Semiconductor industry
Vacuum packaging
Plasma etching process equipment
Features
Capacitor film principle
High precision and good stability
Has good anti-overload capability
Detection is not affected by gas type and composition
Fast response and small hysteresis
Direct pressure measurement, the analog output signal is proportional to the measured pressure
Support various pressure interfaces KF, CF, VCR, etc. in the vacuum industry
Overview
HPM18V is a vacuum Gauge with Diaphragm Protector, also called capacitive film gauge (CDG). Thisproduct uses a ceramic capacitive sensor as a sensitive element and uses a vacuumconnection to directly measure pressure. Its analog output signals such as 0-5 or 0-10VDC are proportional to the measured pressure and are not affected by the type and composition of the process gas. Ceramics have the characteristics of high elasticity, wear resistance, corrosion resistance, and fast heat dissipation, which makes the vacuum gauge have very good thermal stability and low temperature drift.
Application
Vacuum application
Laboratory and research and development
Semiconductor industry
Vacuum packaging
Plasma etching process equipment
Features
Capacitor film principle
High precision and good stability
Has good anti-overload capability
Detection is not affected by gas type and composition
Fast response and small hysteresis
Direct pressure measurement, the analog output signal is proportional to the measured pressure
Support various pressure interfaces KF, CF, VCR, etc. in the vacuum industry
Pressure Range | 0~2Torr…1000Torr | ||||||||
Measuring Medium | Various gases compatible with contact materials | ||||||||
Pressure Range | 0~2Torr…1000Torr | ||||||||
Accuracy | ±0.1%FS,±0.25%FS,±0.5%FS(subject to measuring range) | ||||||||
Working Temperature | -40~85℃ | ||||||||
Supply Voltage | 10~30VDC; 8.5~30 VDC; 12~30VDC; 10~30VDC(subject to output) | ||||||||
Output Signal | 4~20mADC, voltage,RS485 |
Pressure Range | 0~2Torr…1000Torr | ||||||||
Measuring Medium | Various gases compatible with contact materials | ||||||||
Pressure Range | 0~2Torr…1000Torr | ||||||||
Accuracy | ±0.1%FS,±0.25%FS,±0.5%FS(subject to measuring range) | ||||||||
Working Temperature | -40~85℃ | ||||||||
Supply Voltage | 10~30VDC; 8.5~30 VDC; 12~30VDC; 10~30VDC(subject to output) | ||||||||
Output Signal | 4~20mADC, voltage,RS485 |
Overview
HPM18V is a vacuum Gauge with Diaphragm Protector, also called capacitive film gauge (CDG). Thisproduct uses a ceramic capacitive sensor as a sensitive element and uses a vacuumconnection to directly measure pressure. Its analog output signals such as 0-5 or 0-10VDC are proportional to the measured pressure and are not affected by the type and composition of the process gas. Ceramics have the characteristics of high elasticity, wear resistance, corrosion resistance, and fast heat dissipation, which makes the vacuum gauge have very good thermal stability and low temperature drift.
Application
Vacuum application
Laboratory and research and development
Semiconductor industry
Vacuum packaging
Plasma etching process equipment
Features
Capacitor film principle
High precision and good stability
Has good anti-overload capability
Detection is not affected by gas type and composition
Fast response and small hysteresis
Direct pressure measurement, the analog output signal is proportional to the measured pressure
Support various pressure interfaces KF, CF, VCR, etc. in the vacuum industry
Pressure Range | 0~2Torr…1000Torr | ||||||||
Measuring Medium | Various gases compatible with contact materials | ||||||||
Pressure Range | 0~2Torr…1000Torr | ||||||||
Accuracy | ±0.1%FS,±0.25%FS,±0.5%FS(subject to measuring range) | ||||||||
Working Temperature | -40~85℃ | ||||||||
Supply Voltage | 10~30VDC; 8.5~30 VDC; 12~30VDC; 10~30VDC(subject to output) | ||||||||
Output Signal | 4~20mADC, voltage,RS485 |