Home » Products » Pressure Sensors » Differential Pressure Transmiter » HPM18V Capacitance Vacuum Gauge KF16 Connection, Absolute Pressure Transmitter

HPM18V High Precision Capacitance Vacuum Gauge with Diaphragm Protector Absolute PressureTransmitter

HPM18V Capacitance Vacuum Gauge KF16 Connection, Absolute Pressure Transmitter

The HPM18V Capacitance Diaphragm Gauge is a high-precision vacuum gauge for medium and low vacuum measurement, offering ranges from 0.2 to 100 kPa, accuracy up to ±0.1%FS, and 4–20 mA, 0–10 VDC, or RS485 output. Featuring a ceramic capacitive sensor, it provides direct pressure measurement unaffected by gas composition, with excellent stability, fast response, and reliable performance in semiconductor, laboratory, vacuum packaging, and plasma process applications.

Datasheet Download:
HPM18V Capacitance Vacuum Gauge - V26.1.2.pdf

Quantity:
Availability:





Inquire Add to Basket

HPM18V Capacitance Diaphragm Gauge

Item	Specification
Product Name	HPM18V Capacitance Diaphragm Gauge
Product Type	Capacitive Film Gauge (CDG) / Vacuum Gauge
Measuring Principle	Capacitor film principle
Sensor Element	Ceramic capacitive sensor
Measuring Range	0.2 / 0.5 / 1 / 2 / 5 / 10 / 20 / 100 kPa
	2 / 5 / 10 / 20 / 50 / 100 / 200 / 1000 Torr
	2 / 5 / 10 / 20 / 50 / 100 / 200 / 1000 mbar
Output Signal / Supply	4~20mA / Vs=10~30 VDC
	0~5VDC / Vs=8.5~30 VDC
	0~10VDC / Vs=12~30 VDC
	RS485 / Vs=10~30 VDC
Accuracy	±0.1%FS (20kPa, 100kPa)
	±0.25%FS (5kPa, 10kPa)
	±0.5%FS (500Pa, 1kPa, 2kPa)
	±1.5%FS (200Pa)
Long-term Stability	±0.50%FS/year for ≤1kPa
Long-term Stability	±0.25%FS/year for >1kPa
Operating Temperature	-40~125°C
	+125°C max. 120 min
Ambient Temperature	-30~85°C
Storage Temperature	-30~85°C

Overview Of HPM18V Capacitance Diaphragm Gauge

HPM18V is a capacitive vacuum gauge, also called a capacitive thin film vacuum gauge (CDG). This product uses a ceramic capacitive sensor as a sensitive element and directly measures pressure using a vacuum connection. Its analog output signals such as 0-5 or 0-10 VDC are proportional to the measured pressure and are not affected by the type and composition of the process gas. Ceramic has the characteristics of high elasticity, wear resistance, corrosion resistance, and fast heat dissipation, which makes the vacuum gauge have very good thermal stability and low temperature drift.

HPM18V capacitive vacuum gauge has high measurement accuracy, excellent overpressure resistance and excellent long-term stability. Its corrosion-resistant ceramic sensor is temperature compensated, has a wide operating temperature range, and has good zero-point stability. The vacuum gauge is compact in overall size, easy to use and reliable, and is suitable for accurate measurement of medium and low vacuum with complex gas composition.

Application

Vacuum application
Laboratory and research and development
Semiconductor industry
Vacuum packaging
Plasma etching process equipment

Features

Capacitor film principle
High precision and good stability
Has excellent anti-overload capability
Detection is not affected by gas type and composition
Fast response and small hysteresis
Direct pressure measurement, the analog output signal is proportional to the measured pressure
Support various pressure interfaces KF, CF, VCR, etc. in the vacuum industry

Measuring Principle

Capacitive vacuum gauge, also called capacitive film vacuum gauge, works based on the principle of capacitance change and consists of a detection part and a conversion circuit. 微信图片_20260506165131_1370_18

The picture above is a schematic diagram of the detection part. The detection part has two chambers, the vacuum chamber and the detection chamber. The vacuum chamber is a fully sealed structure. After passing the leak detection by the helium mass spectrometer leak detector, it is exhausted for a long time, and finally the exhaust pipe is sealed to maintain a long-term high vacuum. The fixed electrode plate is in the vacuum chamber and is led out of the vacuum chamber by the electrode lead wire. The detection diaphragm is placed between the high vacuum chamber and the detection chamber of the low vacuum system to be tested. The detection diaphragm is a movable plate, which forms a flat capacitor with the fixed plate. The measured low vacuum pressure enters the detection chamber through the detection hole, and the detection diaphragm deflects, changing its distance from the fixed plate, and the capacitance value also changes accordingly. Different low vacuum pressures determine different capacitance values.

The capacitance signal formed by the detection part is sent to the circuit conversion part. The circuit conversion part converts the capacitance signal through transformation, sorting, amplification and conversion, and finally outputs a standard voltage or current signal. This standard electrical signal is derived from the capacitive signal and is proportional to the vacuum pressure.

Schematic diagram labels

Getter
Vacuum chamber
Plate cable outlet
Breather tube
Sealing after exhaust
Fixed board
Detection diaphragm
Detection chamber
Detection hole

Structure Material

Ordering Code	Part	Materials
S4	Pressure Interface	SS304
S6	Pressure Interface	SS316L
PE	Pressure Interface	PEEK
M6	Sensor	Ceramic Al2O3 99.9%
FK	O-Ring	FKM Fluoro rubber
NB	O-Ring	NBR Nitrile

Structure Drawings

OD 1/2" Tube
OD 1/4" Tube
DN 16 ISO-KF
8 VCR, female thread
4 VCR, male thread & 8 VCR, male thread
4 VCR, female thread
M20X1.5

Electrical Connection

Hirschmann/DIN43650 / M12×1-4P / Cable outlet / M12x1-4P with cable

Two-wire 4~20mA current output

	Power supply+ (+V)	Power supply- (0V/+OUT)	Empty
Hirschmann/DIN43650	1	2	3, 4
Cable outlet	Red	Black	-
M12×1	1	2	3,4
M12×1 (with cable)	Brown	Black	Blue, white

Three- wire 0~5V/10V voltage output

	Power supply+(+V)	Common Ground (GND)	Output(+OUT)	Empty
Hirschmann/DIN43650	1	2	3	4
Cable outlet	Red	Black	Blue	-
M12×1	1	2	3	4
M12×1(with cable)	Brown	Black	Blue	White

Four-wire Modbus-RTU/RS485

	Power supply+(+V)	Power supply-(-V)	RS485A	RS485B
Hirschmann/DIN43650	1	2	3	4
Cable outlet	Red	Black	Yellow	Green
M12×1,4P	1	2	3	4
M12×1(with cable)	Brown	Black	Blue	White

Description

Technical Parameters

HPM18V Capacitance Diaphragm Gauge

Item	Specification
Product Name	HPM18V Capacitance Diaphragm Gauge
Product Type	Capacitive Film Gauge (CDG) / Vacuum Gauge
Measuring Principle	Capacitor film principle
Sensor Element	Ceramic capacitive sensor
Measuring Range	0.2 / 0.5 / 1 / 2 / 5 / 10 / 20 / 100 kPa
	2 / 5 / 10 / 20 / 50 / 100 / 200 / 1000 Torr
	2 / 5 / 10 / 20 / 50 / 100 / 200 / 1000 mbar
Output Signal / Supply	4~20mA / Vs=10~30 VDC
	0~5VDC / Vs=8.5~30 VDC
	0~10VDC / Vs=12~30 VDC
	RS485 / Vs=10~30 VDC
Accuracy	±0.1%FS (20kPa, 100kPa)
	±0.25%FS (5kPa, 10kPa)
	±0.5%FS (500Pa, 1kPa, 2kPa)
	±1.5%FS (200Pa)
Long-term Stability	±0.50%FS/year for ≤1kPa
Long-term Stability	±0.25%FS/year for >1kPa
Operating Temperature	-40~125°C
	+125°C max. 120 min
Ambient Temperature	-30~85°C
Storage Temperature	-30~85°C

Overview Of HPM18V Capacitance Diaphragm Gauge

HPM18V is a capacitive vacuum gauge, also called a capacitive thin film vacuum gauge (CDG). This product uses a ceramic capacitive sensor as a sensitive element and directly measures pressure using a vacuum connection. Its analog output signals such as 0-5 or 0-10 VDC are proportional to the measured pressure and are not affected by the type and composition of the process gas. Ceramic has the characteristics of high elasticity, wear resistance, corrosion resistance, and fast heat dissipation, which makes the vacuum gauge have very good thermal stability and low temperature drift.

HPM18V capacitive vacuum gauge has high measurement accuracy, excellent overpressure resistance and excellent long-term stability. Its corrosion-resistant ceramic sensor is temperature compensated, has a wide operating temperature range, and has good zero-point stability. The vacuum gauge is compact in overall size, easy to use and reliable, and is suitable for accurate measurement of medium and low vacuum with complex gas composition.

Application

Vacuum application
Laboratory and research and development
Semiconductor industry
Vacuum packaging
Plasma etching process equipment

Features

Capacitor film principle
High precision and good stability
Has excellent anti-overload capability
Detection is not affected by gas type and composition
Fast response and small hysteresis
Direct pressure measurement, the analog output signal is proportional to the measured pressure
Support various pressure interfaces KF, CF, VCR, etc. in the vacuum industry

Measuring Principle

Capacitive vacuum gauge, also called capacitive film vacuum gauge, works based on the principle of capacitance change and consists of a detection part and a conversion circuit. 微信图片_20260506165131_1370_18

The picture above is a schematic diagram of the detection part. The detection part has two chambers, the vacuum chamber and the detection chamber. The vacuum chamber is a fully sealed structure. After passing the leak detection by the helium mass spectrometer leak detector, it is exhausted for a long time, and finally the exhaust pipe is sealed to maintain a long-term high vacuum. The fixed electrode plate is in the vacuum chamber and is led out of the vacuum chamber by the electrode lead wire. The detection diaphragm is placed between the high vacuum chamber and the detection chamber of the low vacuum system to be tested. The detection diaphragm is a movable plate, which forms a flat capacitor with the fixed plate. The measured low vacuum pressure enters the detection chamber through the detection hole, and the detection diaphragm deflects, changing its distance from the fixed plate, and the capacitance value also changes accordingly. Different low vacuum pressures determine different capacitance values.

The capacitance signal formed by the detection part is sent to the circuit conversion part. The circuit conversion part converts the capacitance signal through transformation, sorting, amplification and conversion, and finally outputs a standard voltage or current signal. This standard electrical signal is derived from the capacitive signal and is proportional to the vacuum pressure.

Schematic diagram labels

Getter
Vacuum chamber
Plate cable outlet
Breather tube
Sealing after exhaust
Fixed board
Detection diaphragm
Detection chamber
Detection hole

Structure Material

Ordering Code	Part	Materials
S4	Pressure Interface	SS304
S6	Pressure Interface	SS316L
PE	Pressure Interface	PEEK
M6	Sensor	Ceramic Al2O3 99.9%
FK	O-Ring	FKM Fluoro rubber
NB	O-Ring	NBR Nitrile

Structure Drawings

OD 1/2" Tube
OD 1/4" Tube
DN 16 ISO-KF
8 VCR, female thread
4 VCR, male thread & 8 VCR, male thread
4 VCR, female thread
M20X1.5

Electrical Connection

Hirschmann/DIN43650 / M12×1-4P / Cable outlet / M12x1-4P with cable

Two-wire 4~20mA current output

	Power supply+ (+V)	Power supply- (0V/+OUT)	Empty
Hirschmann/DIN43650	1	2	3, 4
Cable outlet	Red	Black	-
M12×1	1	2	3,4
M12×1 (with cable)	Brown	Black	Blue, white

Three- wire 0~5V/10V voltage output

	Power supply+(+V)	Common Ground (GND)	Output(+OUT)	Empty
Hirschmann/DIN43650	1	2	3	4
Cable outlet	Red	Black	Blue	-
M12×1	1	2	3	4
M12×1(with cable)	Brown	Black	Blue	White

Four-wire Modbus-RTU/RS485

	Power supply+(+V)	Power supply-(-V)	RS485A	RS485B
Hirschmann/DIN43650	1	2	3	4
Cable outlet	Red	Black	Yellow	Green
M12×1,4P	1	2	3	4
M12×1(with cable)	Brown	Black	Blue	White

Measuring Range
Absolute (kPa)	Rated pressure		0.2	0.5	1	2	5	10	20	100
	Overload		350	350	350	350	400	400	600	1000
Absolute (Torr)	Rated pressure		2	5	10	20	50	100	200	1000
	Overload		2600	2600	2600	2600	3000	3000	4500	7500
Absolute (mbar)	Rated pressure		2	5	10	20	50	100	200	1000
	Overload		3500	3500	3500	3500	4000	4000	6000	10000
Note: For other measuring ranges, please get in touch with us.
Measuring Medium
Type		Various gases compatible with contact materials
Output Signal/Power Supply
Standard			4~20mA / Vs=10~30 V_DC(If has a display, Vs = 13~30 V_DC)
Standard			0~5VDC /Vs=10~30 V_DC
Standard			0~10VDC /Vs=12~30 V_DC
Standard			RS485 /Vs=8~30 V_DC
Performance
Accuracy			±0.1%FS (20kPa,100kPa) ±0.25%FS (5kPa,10kPa) ±0.5%FS (500Pa,1kPa,2KPa) ±1.5%FS (200Pa)
Long-term stability			±0.50%FS/year, ≤1kPa ±0.25%FS/year, >1kPa
*Accuracy complies with IEC 60770 (non-linearity, hysteresis, repeatability)
Environmental Conditions
Temperature range			Working temperature: -40~125℃ (max 120min on +125°C) Ambient temperature: -30~85℃ Storage temperature: -30~85℃
Protection grade			IP65, DIN43650/Hirschmann (C1) IP66, Cable outlet (C2), M12×1 (C5), M12×1 with cable (C5X) IP68, Cable outlet (C2P)
Temperature Drift
Compensation temperature			-20~80℃
Temperature drift of zero point			±1.5%FS (Within compensation temperature)
Temperature drift of full scale			±1.5%FS (Within compensation temperature)