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HPM18V Capacitance Vacuum Gauge KF16 Connection, Absolute Pressure Transmitter

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Overview

The HPM18V is an advanced vacuum gauge, also known as a capacitive film gauge (CDG), designed for precise pressure measurement in various applications. This innovative product utilizes a ceramic capacitive sensor as its sensitive element, ensuring direct and accurate pressure readings through a vacuum connection.

  • Analog Output Signals: The HPM18V provides analog output options such as 0-5V or 0-10V DC, which are directly proportional to the measured pressure. This output is stable and unaffected by the type or composition of the process gas, ensuring reliable data across different environments.

  • Durable Construction: The ceramic sensor offers exceptional characteristics, including high elasticity, wear resistance, and corrosion resistance. These properties contribute to the gauge's long lifespan and reliability in demanding conditions.

  • Thermal Stability: The design of the HPM18V ensures excellent thermal stability and minimal temperature drift, allowing for consistent performance even under varying temperature conditions.

Application

  • Vacuum application

  • Laboratory and research and development

  • Semiconductor industry

  • Vacuum packaging

  • Plasma etching process equipment

Features

  • Capacitor film principle

  • High precision and good stability

  • Has good anti-overload capability

  • Detection is not affected by gas type and composition

  • Fast response and small hysteresis

  • In direct pressure measurement, the analog output signal is proportional to the measured pressure

  • Support various pressure interfaces, KF, CF, VCR, etc. in the vacuum industry



Measuring Range

Absolute

(kPa)

Rated pressure

0.2

0.5

1

2

5

10

20

100

Overload

350

350

350

350

400

400

600

1000

Absolute

(Torr)

Rated pressure

2

5

10

20

50

100

200

1000

Overload

2600

2600

2600

2600

3000

3000

4500

7500

Absolute

(mbar)

Rated pressure

2

5

10

20

50

100

200

1000

Overload

3500

3500

3500

3500

4000

4000

6000

10000

Note: For other measuring ranges, please get in touch with us.

Measuring Medium

Type

Various gases compatible with contact materials

Output Signal/Power Supply

Standard

4~20mA      / Vs=10~30 VDC (If has a display, Vs = 13~30 VDC)

Standard

0~5VDC      /Vs=10~30 VDC

Standard

0~10VDC    /Vs=12~30 VDC

Standard

RS485       /Vs=8~30 VDC

Performance

Accuracy

±0.1%FS (20kPa,100kPa)

±0.25%FS (5kPa,10kPa)

±0.5%FS (500Pa,1kPa,2KPa)

±1.5%FS (200Pa)

Long-term stability

±0.50%FS/year, ≤1kPa

±0.25%FS/year, >1kPa

*Accuracy complies with IEC 60770 (non-linearity, hysteresis, repeatability)

Environmental Conditions

Temperature range

Working temperature: -40~125℃ (max 120min on +125°C)

Ambient temperature: -30~85℃

Storage temperature: -30~85℃

Protection grade

IP65, DIN43650/Hirschmann (C1)

IP66, Cable outlet (C2), M12×1 (C5), M12×1 with cable (C5X)

IP68, Cable outlet (C2P)

Temperature Drift


Compensation temperature

-20~80℃

Temperature drift of zero point

±1.5%FS (Within compensation temperature)

Temperature drift of full scale

±1.5%FS (Within compensation temperature)


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