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Overview
The HPM18V is an advanced vacuum gauge, also known as a capacitive film gauge (CDG), designed for precise pressure measurement in various applications. This innovative product utilizes a ceramic capacitive sensor as its sensitive element, ensuring direct and accurate pressure readings through a vacuum connection.
Analog Output Signals: The HPM18V provides analog output options such as 0-5V or 0-10V DC, which are directly proportional to the measured pressure. This output is stable and unaffected by the type or composition of the process gas, ensuring reliable data across different environments.
Durable Construction: The ceramic sensor offers exceptional characteristics, including high elasticity, wear resistance, and corrosion resistance. These properties contribute to the gauge's long lifespan and reliability in demanding conditions.
Thermal Stability: The design of the HPM18V ensures excellent thermal stability and minimal temperature drift, allowing for consistent performance even under varying temperature conditions.
Application
Vacuum application
Laboratory and research and development
Semiconductor industry
Vacuum packaging
Plasma etching process equipment
Features
Capacitor film principle
High precision and good stability
Has good anti-overload capability
Detection is not affected by gas type and composition
Fast response and small hysteresis
In direct pressure measurement, the analog output signal is proportional to the measured pressure
Support various pressure interfaces, KF, CF, VCR, etc. in the vacuum industry
Measuring Range | ||||||||||
Absolute (kPa) | Rated pressure | 0.2 | 0.5 | 1 | 2 | 5 | 10 | 20 | 100 | |
Overload | 350 | 350 | 350 | 350 | 400 | 400 | 600 | 1000 | ||
Absolute (Torr) | Rated pressure | 2 | 5 | 10 | 20 | 50 | 100 | 200 | 1000 | |
Overload | 2600 | 2600 | 2600 | 2600 | 3000 | 3000 | 4500 | 7500 | ||
Absolute (mbar) | Rated pressure | 2 | 5 | 10 | 20 | 50 | 100 | 200 | 1000 | |
Overload | 3500 | 3500 | 3500 | 3500 | 4000 | 4000 | 6000 | 10000 | ||
Note: For other measuring ranges, please get in touch with us. | ||||||||||
Measuring Medium | ||||||||||
Type | Various gases compatible with contact materials | |||||||||
Output Signal/Power Supply | ||||||||||
Standard | 4~20mA / Vs=10~30 VDC (If has a display, Vs = 13~30 VDC) | |||||||||
Standard | 0~5VDC /Vs=10~30 VDC | |||||||||
Standard | 0~10VDC /Vs=12~30 VDC | |||||||||
Standard | RS485 /Vs=8~30 VDC | |||||||||
Performance | ||||||||||
Accuracy | ±0.1%FS (20kPa,100kPa) ±0.25%FS (5kPa,10kPa) ±0.5%FS (500Pa,1kPa,2KPa) ±1.5%FS (200Pa) | |||||||||
Long-term stability | ±0.50%FS/year, ≤1kPa ±0.25%FS/year, >1kPa | |||||||||
*Accuracy complies with IEC 60770 (non-linearity, hysteresis, repeatability) | ||||||||||
Environmental Conditions | ||||||||||
Temperature range | Working temperature: -40~125℃ (max 120min on +125°C) Ambient temperature: -30~85℃ Storage temperature: -30~85℃ | |||||||||
Protection grade | IP65, DIN43650/Hirschmann (C1) IP66, Cable outlet (C2), M12×1 (C5), M12×1 with cable (C5X) IP68, Cable outlet (C2P) | |||||||||
Temperature Drift | ||||||||||
Compensation temperature | -20~80℃ | |||||||||
Temperature drift of zero point | ±1.5%FS (Within compensation temperature) | |||||||||
Temperature drift of full scale | ±1.5%FS (Within compensation temperature) | |||||||||
Overview
The HPM18V is an advanced vacuum gauge, also known as a capacitive film gauge (CDG), designed for precise pressure measurement in various applications. This innovative product utilizes a ceramic capacitive sensor as its sensitive element, ensuring direct and accurate pressure readings through a vacuum connection.
Analog Output Signals: The HPM18V provides analog output options such as 0-5V or 0-10V DC, which are directly proportional to the measured pressure. This output is stable and unaffected by the type or composition of the process gas, ensuring reliable data across different environments.
Durable Construction: The ceramic sensor offers exceptional characteristics, including high elasticity, wear resistance, and corrosion resistance. These properties contribute to the gauge's long lifespan and reliability in demanding conditions.
Thermal Stability: The design of the HPM18V ensures excellent thermal stability and minimal temperature drift, allowing for consistent performance even under varying temperature conditions.
Application
Vacuum application
Laboratory and research and development
Semiconductor industry
Vacuum packaging
Plasma etching process equipment
Features
Capacitor film principle
High precision and good stability
Has good anti-overload capability
Detection is not affected by gas type and composition
Fast response and small hysteresis
In direct pressure measurement, the analog output signal is proportional to the measured pressure
Support various pressure interfaces, KF, CF, VCR, etc. in the vacuum industry
Measuring Range | ||||||||||
Absolute (kPa) | Rated pressure | 0.2 | 0.5 | 1 | 2 | 5 | 10 | 20 | 100 | |
Overload | 350 | 350 | 350 | 350 | 400 | 400 | 600 | 1000 | ||
Absolute (Torr) | Rated pressure | 2 | 5 | 10 | 20 | 50 | 100 | 200 | 1000 | |
Overload | 2600 | 2600 | 2600 | 2600 | 3000 | 3000 | 4500 | 7500 | ||
Absolute (mbar) | Rated pressure | 2 | 5 | 10 | 20 | 50 | 100 | 200 | 1000 | |
Overload | 3500 | 3500 | 3500 | 3500 | 4000 | 4000 | 6000 | 10000 | ||
Note: For other measuring ranges, please get in touch with us. | ||||||||||
Measuring Medium | ||||||||||
Type | Various gases compatible with contact materials | |||||||||
Output Signal/Power Supply | ||||||||||
Standard | 4~20mA / Vs=10~30 VDC (If has a display, Vs = 13~30 VDC) | |||||||||
Standard | 0~5VDC /Vs=10~30 VDC | |||||||||
Standard | 0~10VDC /Vs=12~30 VDC | |||||||||
Standard | RS485 /Vs=8~30 VDC | |||||||||
Performance | ||||||||||
Accuracy | ±0.1%FS (20kPa,100kPa) ±0.25%FS (5kPa,10kPa) ±0.5%FS (500Pa,1kPa,2KPa) ±1.5%FS (200Pa) | |||||||||
Long-term stability | ±0.50%FS/year, ≤1kPa ±0.25%FS/year, >1kPa | |||||||||
*Accuracy complies with IEC 60770 (non-linearity, hysteresis, repeatability) | ||||||||||
Environmental Conditions | ||||||||||
Temperature range | Working temperature: -40~125℃ (max 120min on +125°C) Ambient temperature: -30~85℃ Storage temperature: -30~85℃ | |||||||||
Protection grade | IP65, DIN43650/Hirschmann (C1) IP66, Cable outlet (C2), M12×1 (C5), M12×1 with cable (C5X) IP68, Cable outlet (C2P) | |||||||||
Temperature Drift | ||||||||||
Compensation temperature | -20~80℃ | |||||||||
Temperature drift of zero point | ±1.5%FS (Within compensation temperature) | |||||||||
Temperature drift of full scale | ±1.5%FS (Within compensation temperature) | |||||||||