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HPM10V is a piezoresistive vacuum gauge. It uses a silicon piezoresistive sensor as the sensitive element and directly measures pressure using a vacuum connection. Its analog output signals such as 0-5 or 0-10 VDC are proportional to the measured pressure and are not affected by the type and composition of the process gas. The diffused silicon chip inside the sensor is encapsulated by a stainless steel 316L diaphragm and cavity. A specially developed dedicated circuit board ensures stable and reliable performance and a compact appearance. The HPM10V piezoresistive vacuum gauge has high measurement accuracy and excellent long-term stability. The internal high-quality silicon piezoresistive sensor is temperature compensated and has a wide operating temperature range. The vacuum gauge is small in overall size, easy to use and reliable, and is suitable for low vacuum precision measurement of complex gas compositions.
HPM10V is a piezoresistive vacuum gauge. It uses a silicon piezoresistive sensor as the sensitive element and directly measures pressure using a vacuum connection. Its analog output signals such as 0-5 or 0-10 VDC are proportional to the measured pressure and are not affected by the type and composition of the process gas. The diffused silicon chip inside the sensor is encapsulated by a stainless steel 316L diaphragm and cavity. A specially developed dedicated circuit board ensures stable and reliable performance and a compact appearance. The HPM10V piezoresistive vacuum gauge has high measurement accuracy and excellent long-term stability. The internal high-quality silicon piezoresistive sensor is temperature compensated and has a wide operating temperature range. The vacuum gauge is small in overall size, easy to use and reliable, and is suitable for low vacuum precision measurement of complex gas compositions.
Application
Vacuum application
Laboratory and research and development
Semiconductor industry
Vacuum packaging
Plasma etching process equipment
Application
Vacuum application
Laboratory and research and development
Semiconductor industry
Vacuum packaging
Plasma etching process equipment
Features
Silicon piezoresistive principle
High precision and good stability
Detection is not affected by gas type and composition
Fast response and low hysteresis
Direct pressure measurement, analog output signal is proportional to the measured pressure
Suupport various pressure interfaces KF, CF, VCR, etc. in the vacuum industry
Features
Silicon piezoresistive principle
High precision and good stability
Detection is not affected by gas type and composition
Fast response and low hysteresis
Direct pressure measurement, analog output signal is proportional to the measured pressure
Suupport various pressure interfaces KF, CF, VCR, etc. in the vacuum industry
Technical Parameters
Measuring Range | |||||||||
Absolute(kPa) | Rated pressure | 0.2 | 0.5 | 1 | 2 | 5 | 10 | 20 | 100 |
Overload | 200 | 200 | 200 | 200 | 400 | 400 | 600 | 1000 | |
Absolute(Torr) | Rated pressure | 2 | 5 | 10 | 20 | 50 | 100 | 200 | 1000 |
Overload | 2000 | 2000 | 2000 | 2000 | 4000 | 4000 | 6000 | 10000 | |
Absolute(mbar) | Rated pressure | 2 | 5 | 10 | 20 | 50 | 100 | 200 | 1000 |
Overload | 2000 | 2000 | 2000 | 2000 | 4000 | 4000 | 6000 | 10000 | |
Note: For other measuring ranges, please contact us. |
Measuring Medium | ||||
Type | Various gases compatible with contact materials | |||
Output Signal/Power Supply | ||||
Standard | 4~20mA / Vs=10~30 VDC | |||
Standard | 0~5VDC /Vs=8.5~30 VDC | |||
Standard | 0~10VDC /Vs=12~30 VDC | |||
Standard | RS485 /Vs=10~30 VDC | |||
Performance | ||||
Accuracy | ±0.25%FS (typical) ±0.1%FS (optional) * Only for range P≥35kPaA | |||
Long-term stability | ±0.30%FS/year, ≤35kPa ±0.20%FS/year, >35kPa | |||
*Accuracy complies with IEC 60770 (non-linearity, hysteresis, repeatability) | ||||
Environment Conditions | ||||
Temperature range | Working temperature: -40~100℃ Ambient temperature: -30~85℃ Storage temperature: -30~85℃ | |||
Protection grade | IP65 | |||
Temperature Drift | ||||
Compensation temperature | 0~70℃,≤35kPa; -10~80℃,>35kPa | |||
Temperature drift of zero point | ±1.0%FS (Within compensation temperature) | |||
Temperature drift of full scale | ±1.0%FS (Within compensation temperature) |
Technical Parameters
Measuring Range | |||||||||
Absolute(kPa) | Rated pressure | 0.2 | 0.5 | 1 | 2 | 5 | 10 | 20 | 100 |
Overload | 200 | 200 | 200 | 200 | 400 | 400 | 600 | 1000 | |
Absolute(Torr) | Rated pressure | 2 | 5 | 10 | 20 | 50 | 100 | 200 | 1000 |
Overload | 2000 | 2000 | 2000 | 2000 | 4000 | 4000 | 6000 | 10000 | |
Absolute(mbar) | Rated pressure | 2 | 5 | 10 | 20 | 50 | 100 | 200 | 1000 |
Overload | 2000 | 2000 | 2000 | 2000 | 4000 | 4000 | 6000 | 10000 | |
Note: For other measuring ranges, please contact us. |
Measuring Medium | ||||
Type | Various gases compatible with contact materials | |||
Output Signal/Power Supply | ||||
Standard | 4~20mA / Vs=10~30 VDC | |||
Standard | 0~5VDC /Vs=8.5~30 VDC | |||
Standard | 0~10VDC /Vs=12~30 VDC | |||
Standard | RS485 /Vs=10~30 VDC | |||
Performance | ||||
Accuracy | ±0.25%FS (typical) ±0.1%FS (optional) * Only for range P≥35kPaA | |||
Long-term stability | ±0.30%FS/year, ≤35kPa ±0.20%FS/year, >35kPa | |||
*Accuracy complies with IEC 60770 (non-linearity, hysteresis, repeatability) | ||||
Environment Conditions | ||||
Temperature range | Working temperature: -40~100℃ Ambient temperature: -30~85℃ Storage temperature: -30~85℃ | |||
Protection grade | IP65 | |||
Temperature Drift | ||||
Compensation temperature | 0~70℃,≤35kPa; -10~80℃,>35kPa | |||
Temperature drift of zero point | ±1.0%FS (Within compensation temperature) | |||
Temperature drift of full scale | ±1.0%FS (Within compensation temperature) |
HPM10V is a piezoresistive vacuum gauge. It uses a silicon piezoresistive sensor as the sensitive element and directly measures pressure using a vacuum connection. Its analog output signals such as 0-5 or 0-10 VDC are proportional to the measured pressure and are not affected by the type and composition of the process gas. The diffused silicon chip inside the sensor is encapsulated by a stainless steel 316L diaphragm and cavity. A specially developed dedicated circuit board ensures stable and reliable performance and a compact appearance. The HPM10V piezoresistive vacuum gauge has high measurement accuracy and excellent long-term stability. The internal high-quality silicon piezoresistive sensor is temperature compensated and has a wide operating temperature range. The vacuum gauge is small in overall size, easy to use and reliable, and is suitable for low vacuum precision measurement of complex gas compositions.
Application
Vacuum application
Laboratory and research and development
Semiconductor industry
Vacuum packaging
Plasma etching process equipment
Features
Silicon piezoresistive principle
High precision and good stability
Detection is not affected by gas type and composition
Fast response and low hysteresis
Direct pressure measurement, analog output signal is proportional to the measured pressure
Suupport various pressure interfaces KF, CF, VCR, etc. in the vacuum industry
Technical Parameters
Measuring Range | |||||||||
Absolute(kPa) | Rated pressure | 0.2 | 0.5 | 1 | 2 | 5 | 10 | 20 | 100 |
Overload | 200 | 200 | 200 | 200 | 400 | 400 | 600 | 1000 | |
Absolute(Torr) | Rated pressure | 2 | 5 | 10 | 20 | 50 | 100 | 200 | 1000 |
Overload | 2000 | 2000 | 2000 | 2000 | 4000 | 4000 | 6000 | 10000 | |
Absolute(mbar) | Rated pressure | 2 | 5 | 10 | 20 | 50 | 100 | 200 | 1000 |
Overload | 2000 | 2000 | 2000 | 2000 | 4000 | 4000 | 6000 | 10000 | |
Note: For other measuring ranges, please contact us. |
Measuring Medium | ||||
Type | Various gases compatible with contact materials | |||
Output Signal/Power Supply | ||||
Standard | 4~20mA / Vs=10~30 VDC | |||
Standard | 0~5VDC /Vs=8.5~30 VDC | |||
Standard | 0~10VDC /Vs=12~30 VDC | |||
Standard | RS485 /Vs=10~30 VDC | |||
Performance | ||||
Accuracy | ±0.25%FS (typical) ±0.1%FS (optional) * Only for range P≥35kPaA | |||
Long-term stability | ±0.30%FS/year, ≤35kPa ±0.20%FS/year, >35kPa | |||
*Accuracy complies with IEC 60770 (non-linearity, hysteresis, repeatability) | ||||
Environment Conditions | ||||
Temperature range | Working temperature: -40~100℃ Ambient temperature: -30~85℃ Storage temperature: -30~85℃ | |||
Protection grade | IP65 | |||
Temperature Drift | ||||
Compensation temperature | 0~70℃,≤35kPa; -10~80℃,>35kPa | |||
Temperature drift of zero point | ±1.0%FS (Within compensation temperature) | |||
Temperature drift of full scale | ±1.0%FS (Within compensation temperature) |