Home » Products » Pressure Sensors » Industrial Pressure Sensors » HPM10V Cost-effective 0-200Kpa Absolute Pressure Transmitter KF16 Connection

HPM10V Cost-effective 0-200Kpa Absolute Pressure Transmitter KF16 Connection

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HPM10V is a piezoresistive vacuum gauge. It uses a silicon piezoresistive sensor as the sensitive element and directly measures pressure using a vacuum connection. Its analog output signals such as 0-5 or 0-10 VDC are proportional to the measured pressure and are not affected by the type and composition of the process gas. The diffused silicon chip inside the sensor is encapsulated by a stainless steel 316L diaphragm and cavity. A specially developed dedicated circuit board ensures stable and reliable performance and a compact appearance. The HPM10V piezoresistive vacuum gauge has high measurement accuracy and excellent long-term stability. The internal high-quality silicon piezoresistive sensor is temperature compensated and has a wide operating temperature range. The vacuum gauge is small in overall size, easy to use and reliable, and is suitable for low vacuum precision measurement of complex gas compositions.




Application


  • Vacuum application

  • Laboratory and research and development

  • Semiconductor industry

  • Vacuum packaging

  • Plasma etching process equipment


Features


  • Silicon piezoresistive principle

  • High precision and good stability

  • Detection is not affected by gas type and composition

  • Fast response and low hysteresis

  • Direct pressure measurement, analog output signal is proportional to the measured pressure

  • Suupport various pressure interfaces KF, CF, VCR, etc. in the vacuum industry


Technical Parameters


Measuring Range

Absolute(kPa)

Rated pressure

0.2

0.5

1

2

5

10

20

100

Overload

200

200

200

200

400

400

600

1000

Absolute(Torr)

Rated pressure

2

5

10

20

50

100

200

1000

Overload

2000

2000

2000

2000

4000

4000

6000

10000

Absolute(mbar)

Rated pressure

2

5

10

20

50

100

200

1000

Overload

2000

2000

2000

2000

4000

4000

6000

10000

Note: For other measuring ranges, please contact us.

Measuring Medium

Type

Various gases compatible with contact materials

Output Signal/Power Supply

Standard

4~20mA      / Vs=10~30 VDC

Standard

0~5VDC      /Vs=8.5~30 VDC

Standard

0~10VDC    /Vs=12~30 VDC

Standard

RS485       /Vs=10~30 VDC

Performance

Accuracy

±0.25%FS (typical)

±0.1%FS (optional) * Only for range P≥35kPaA

Long-term stability

±0.30%FS/year, ≤35kPa

±0.20%FS/year, >35kPa

*Accuracy complies with IEC 60770 (non-linearity, hysteresis, repeatability)

Environment Conditions

Temperature range

Working temperature: -40~100℃

Ambient temperature: -30~85℃

Storage temperature: -30~85℃

Protection grade

IP65

Temperature Drift


Compensation temperature

0~70℃,≤35kPa;  -10~80℃,>35kPa

Temperature drift of zero point

±1.0%FS (Within compensation temperature)

Temperature drift of full scale

±1.0%FS (Within compensation temperature)



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Contact Us

   No.18, Fenghua Road, Yuhua Economic Development Zone, Nanjing, Jiangsu,China
   +86-17551075580
    info@hjsensor.com
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