HPM10V is a piezoresistive vacuum gauge. It uses a silicon piezoresistive sensor as the sensitive element and directly measures pressure using a vacuum connection. Its analog output signals such as 0-5 or 0-10 VDC are proportional to the measured pressure and are not affected by the type and composition of the process gas. The diffused silicon chip inside the sensor is encapsulated by a stainless steel 316L diaphragm and cavity. A specially developed dedicated circuit board ensures stable and reliable performance and a compact appearance. The HPM10V piezoresistive vacuum gauge has high measurement accuracy and excellent long-term stability. The internal high-quality silicon piezoresistive sensor is temperature compensated and has a wide operating temperature range. The vacuum gauge is small in overall size, easy to use and reliable, and is suitable for low vacuum precision measurement of complex gas compositions.
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The HPM10V KF16 absolute pressure transmitter is a cost-effective piezoresistive vacuum gauge engineered for low vacuum precision measurement across industrial gas systems. Built with a silicon piezoresistive sensor as the core sensitive element, this device adopts direct pressure detection via a KF16 vacuum connection, delivering analog output signals (0-5 VDC/0-10 VDC/4-20mA) that maintain strict proportionality with measured pressure—unaffected by the type or composition of process gases. Its internal diffused silicon chip is hermetically encapsulated in a 316L stainless steel diaphragm and cavity, paired with a custom dedicated circuit board for compactness, stable performance and long-term reliability. The HPM10V features factory-calibrated temperature compensation, a wide operating temperature range (-40~100℃) and IP65 protection grade, making it a robust solution for industrial users requiring accurate vacuum measurement in complex gas environments. With rated absolute pressure ranges from 0.2kPa to 100kPa (2mbar to 1000mbar) and overload capacity up to 1000kPa, it balances precision and durability for continuous industrial operation.
Gas-independent detection: Measurements remain accurate regardless of process gas type/composition, eliminating calibration adjustments for gas changes and reducing operational downtime for industrial facilities.
Superior measurement accuracy: Delivers ±0.25%FS typical accuracy (±0.1%FS optional for P≥35kPaA), complying with IEC 60770 standards for non-linearity, hysteresis and repeatability—critical for high-precision vacuum processes.
Exceptional long-term stability: Boasts ±0.30%FS/year stability for pressures ≤35kPa and ±0.20%FS/year for >35kPa, minimizing recalibration needs and lowering maintenance costs for industrial plant managers.
Rugged industrial design: 316L stainless steel construction, wide temperature tolerance and IP65 protection ensure reliable performance in harsh industrial environments, including high-temperature and dusty settings.
Fast response & low hysteresis: Enables real-time pressure monitoring for dynamic vacuum processes, such as plasma etching and vacuum packaging, improving process control efficiency.
This piezoresistive vacuum gauge is tailored for industrial users in vacuum-reliant sectors, with core applications including:
Semiconductor manufacturing: Critical for plasma etching process equipment, where precise low vacuum control ensures wafer processing quality and yield.
Vacuum packaging industry: Enables accurate pressure monitoring for food, electronics and medical device vacuum sealing, preserving product integrity and shelf life.
Laboratory & R&D facilities: Ideal for vacuum research and experimental setups, supporting academic and industrial research on gas dynamics and material science.
General industrial vacuum applications: Suited for vacuum furnaces, vacuum coating equipment and other low-vacuum industrial systems requiring consistent pressure measurement.
Aerospace & automotive component testing: Delivers reliable vacuum data for component performance testing under low-pressure conditions, ensuring product compliance with industrial standards.
Yes, it is compatible with various gases compatible with 316L stainless steel—the contact material. For highly corrosive gases, custom material options are available upon request for industrial users with specialized needs.
In addition to the standard KF16 connection, it supports CF, VCR and other vacuum industry standard interfaces, with custom interface options available to match specific industrial equipment requirements.
The HPM10V KF16 absolute pressure transmitter is a cost-effective piezoresistive vacuum gauge engineered for low vacuum precision measurement across industrial gas systems. Built with a silicon piezoresistive sensor as the core sensitive element, this device adopts direct pressure detection via a KF16 vacuum connection, delivering analog output signals (0-5 VDC/0-10 VDC/4-20mA) that maintain strict proportionality with measured pressure—unaffected by the type or composition of process gases. Its internal diffused silicon chip is hermetically encapsulated in a 316L stainless steel diaphragm and cavity, paired with a custom dedicated circuit board for compactness, stable performance and long-term reliability. The HPM10V features factory-calibrated temperature compensation, a wide operating temperature range (-40~100℃) and IP65 protection grade, making it a robust solution for industrial users requiring accurate vacuum measurement in complex gas environments. With rated absolute pressure ranges from 0.2kPa to 100kPa (2mbar to 1000mbar) and overload capacity up to 1000kPa, it balances precision and durability for continuous industrial operation.
Gas-independent detection: Measurements remain accurate regardless of process gas type/composition, eliminating calibration adjustments for gas changes and reducing operational downtime for industrial facilities.
Superior measurement accuracy: Delivers ±0.25%FS typical accuracy (±0.1%FS optional for P≥35kPaA), complying with IEC 60770 standards for non-linearity, hysteresis and repeatability—critical for high-precision vacuum processes.
Exceptional long-term stability: Boasts ±0.30%FS/year stability for pressures ≤35kPa and ±0.20%FS/year for >35kPa, minimizing recalibration needs and lowering maintenance costs for industrial plant managers.
Rugged industrial design: 316L stainless steel construction, wide temperature tolerance and IP65 protection ensure reliable performance in harsh industrial environments, including high-temperature and dusty settings.
Fast response & low hysteresis: Enables real-time pressure monitoring for dynamic vacuum processes, such as plasma etching and vacuum packaging, improving process control efficiency.
This piezoresistive vacuum gauge is tailored for industrial users in vacuum-reliant sectors, with core applications including:
Semiconductor manufacturing: Critical for plasma etching process equipment, where precise low vacuum control ensures wafer processing quality and yield.
Vacuum packaging industry: Enables accurate pressure monitoring for food, electronics and medical device vacuum sealing, preserving product integrity and shelf life.
Laboratory & R&D facilities: Ideal for vacuum research and experimental setups, supporting academic and industrial research on gas dynamics and material science.
General industrial vacuum applications: Suited for vacuum furnaces, vacuum coating equipment and other low-vacuum industrial systems requiring consistent pressure measurement.
Aerospace & automotive component testing: Delivers reliable vacuum data for component performance testing under low-pressure conditions, ensuring product compliance with industrial standards.
Yes, it is compatible with various gases compatible with 316L stainless steel—the contact material. For highly corrosive gases, custom material options are available upon request for industrial users with specialized needs.
In addition to the standard KF16 connection, it supports CF, VCR and other vacuum industry standard interfaces, with custom interface options available to match specific industrial equipment requirements.
Measuring Range | |||||||||
Absolute(kPa) | Rated pressure | 0.2 | 0.5 | 1 | 2 | 5 | 10 | 20 | 100 |
Overload | 200 | 200 | 200 | 200 | 400 | 400 | 600 | 1000 | |
Absolute(Torr) | Rated pressure | 2 | 5 | 10 | 20 | 50 | 100 | 200 | 1000 |
Overload | 2000 | 2000 | 2000 | 2000 | 4000 | 4000 | 6000 | 10000 | |
Absolute(mbar) | Rated pressure | 2 | 5 | 10 | 20 | 50 | 100 | 200 | 1000 |
Overload | 2000 | 2000 | 2000 | 2000 | 4000 | 4000 | 6000 | 10000 | |
Note: For other measuring ranges, please contact us. | |||||||||
Measuring Medium | ||||
Type | Various gases compatible with contact materials | |||
Output Signal/Power Supply | ||||
Standard | 4~20mA / Vs=10~30 VDC | |||
Standard | 0~5VDC /Vs=8.5~30 VDC | |||
Standard | 0~10VDC /Vs=12~30 VDC | |||
Standard | RS485 /Vs=10~30 VDC | |||
Performance | ||||
Accuracy | ±0.25%FS (typical) ±0.1%FS (optional) * Only for range P≥35kPaA | |||
Long-term stability | ±0.30%FS/year, ≤35kPa ±0.20%FS/year, >35kPa | |||
*Accuracy complies with IEC 60770 (non-linearity, hysteresis, repeatability) | ||||
Environment Conditions | ||||
Temperature range | Working temperature: -40~100℃ Ambient temperature: -30~85℃ Storage temperature: -30~85℃ | |||
Protection grade | IP65 | |||
Temperature Drift | ||||
Compensation temperature | 0~70℃,≤35kPa; -10~80℃,>35kPa | |||
Temperature drift of zero point | ±1.0%FS (Within compensation temperature) | |||
Temperature drift of full scale | ±1.0%FS (Within compensation temperature) | |||
Measuring Range | |||||||||
Absolute(kPa) | Rated pressure | 0.2 | 0.5 | 1 | 2 | 5 | 10 | 20 | 100 |
Overload | 200 | 200 | 200 | 200 | 400 | 400 | 600 | 1000 | |
Absolute(Torr) | Rated pressure | 2 | 5 | 10 | 20 | 50 | 100 | 200 | 1000 |
Overload | 2000 | 2000 | 2000 | 2000 | 4000 | 4000 | 6000 | 10000 | |
Absolute(mbar) | Rated pressure | 2 | 5 | 10 | 20 | 50 | 100 | 200 | 1000 |
Overload | 2000 | 2000 | 2000 | 2000 | 4000 | 4000 | 6000 | 10000 | |
Note: For other measuring ranges, please contact us. | |||||||||
Measuring Medium | ||||
Type | Various gases compatible with contact materials | |||
Output Signal/Power Supply | ||||
Standard | 4~20mA / Vs=10~30 VDC | |||
Standard | 0~5VDC /Vs=8.5~30 VDC | |||
Standard | 0~10VDC /Vs=12~30 VDC | |||
Standard | RS485 /Vs=10~30 VDC | |||
Performance | ||||
Accuracy | ±0.25%FS (typical) ±0.1%FS (optional) * Only for range P≥35kPaA | |||
Long-term stability | ±0.30%FS/year, ≤35kPa ±0.20%FS/year, >35kPa | |||
*Accuracy complies with IEC 60770 (non-linearity, hysteresis, repeatability) | ||||
Environment Conditions | ||||
Temperature range | Working temperature: -40~100℃ Ambient temperature: -30~85℃ Storage temperature: -30~85℃ | |||
Protection grade | IP65 | |||
Temperature Drift | ||||
Compensation temperature | 0~70℃,≤35kPa; -10~80℃,>35kPa | |||
Temperature drift of zero point | ±1.0%FS (Within compensation temperature) | |||
Temperature drift of full scale | ±1.0%FS (Within compensation temperature) | |||
The HPM10V KF16 absolute pressure transmitter is a cost-effective piezoresistive vacuum gauge engineered for low vacuum precision measurement across industrial gas systems. Built with a silicon piezoresistive sensor as the core sensitive element, this device adopts direct pressure detection via a KF16 vacuum connection, delivering analog output signals (0-5 VDC/0-10 VDC/4-20mA) that maintain strict proportionality with measured pressure—unaffected by the type or composition of process gases. Its internal diffused silicon chip is hermetically encapsulated in a 316L stainless steel diaphragm and cavity, paired with a custom dedicated circuit board for compactness, stable performance and long-term reliability. The HPM10V features factory-calibrated temperature compensation, a wide operating temperature range (-40~100℃) and IP65 protection grade, making it a robust solution for industrial users requiring accurate vacuum measurement in complex gas environments. With rated absolute pressure ranges from 0.2kPa to 100kPa (2mbar to 1000mbar) and overload capacity up to 1000kPa, it balances precision and durability for continuous industrial operation.
Gas-independent detection: Measurements remain accurate regardless of process gas type/composition, eliminating calibration adjustments for gas changes and reducing operational downtime for industrial facilities.
Superior measurement accuracy: Delivers ±0.25%FS typical accuracy (±0.1%FS optional for P≥35kPaA), complying with IEC 60770 standards for non-linearity, hysteresis and repeatability—critical for high-precision vacuum processes.
Exceptional long-term stability: Boasts ±0.30%FS/year stability for pressures ≤35kPa and ±0.20%FS/year for >35kPa, minimizing recalibration needs and lowering maintenance costs for industrial plant managers.
Rugged industrial design: 316L stainless steel construction, wide temperature tolerance and IP65 protection ensure reliable performance in harsh industrial environments, including high-temperature and dusty settings.
Fast response & low hysteresis: Enables real-time pressure monitoring for dynamic vacuum processes, such as plasma etching and vacuum packaging, improving process control efficiency.
This piezoresistive vacuum gauge is tailored for industrial users in vacuum-reliant sectors, with core applications including:
Semiconductor manufacturing: Critical for plasma etching process equipment, where precise low vacuum control ensures wafer processing quality and yield.
Vacuum packaging industry: Enables accurate pressure monitoring for food, electronics and medical device vacuum sealing, preserving product integrity and shelf life.
Laboratory & R&D facilities: Ideal for vacuum research and experimental setups, supporting academic and industrial research on gas dynamics and material science.
General industrial vacuum applications: Suited for vacuum furnaces, vacuum coating equipment and other low-vacuum industrial systems requiring consistent pressure measurement.
Aerospace & automotive component testing: Delivers reliable vacuum data for component performance testing under low-pressure conditions, ensuring product compliance with industrial standards.
Yes, it is compatible with various gases compatible with 316L stainless steel—the contact material. For highly corrosive gases, custom material options are available upon request for industrial users with specialized needs.
In addition to the standard KF16 connection, it supports CF, VCR and other vacuum industry standard interfaces, with custom interface options available to match specific industrial equipment requirements.
Measuring Range | |||||||||
Absolute(kPa) | Rated pressure | 0.2 | 0.5 | 1 | 2 | 5 | 10 | 20 | 100 |
Overload | 200 | 200 | 200 | 200 | 400 | 400 | 600 | 1000 | |
Absolute(Torr) | Rated pressure | 2 | 5 | 10 | 20 | 50 | 100 | 200 | 1000 |
Overload | 2000 | 2000 | 2000 | 2000 | 4000 | 4000 | 6000 | 10000 | |
Absolute(mbar) | Rated pressure | 2 | 5 | 10 | 20 | 50 | 100 | 200 | 1000 |
Overload | 2000 | 2000 | 2000 | 2000 | 4000 | 4000 | 6000 | 10000 | |
Note: For other measuring ranges, please contact us. | |||||||||
Measuring Medium | ||||
Type | Various gases compatible with contact materials | |||
Output Signal/Power Supply | ||||
Standard | 4~20mA / Vs=10~30 VDC | |||
Standard | 0~5VDC /Vs=8.5~30 VDC | |||
Standard | 0~10VDC /Vs=12~30 VDC | |||
Standard | RS485 /Vs=10~30 VDC | |||
Performance | ||||
Accuracy | ±0.25%FS (typical) ±0.1%FS (optional) * Only for range P≥35kPaA | |||
Long-term stability | ±0.30%FS/year, ≤35kPa ±0.20%FS/year, >35kPa | |||
*Accuracy complies with IEC 60770 (non-linearity, hysteresis, repeatability) | ||||
Environment Conditions | ||||
Temperature range | Working temperature: -40~100℃ Ambient temperature: -30~85℃ Storage temperature: -30~85℃ | |||
Protection grade | IP65 | |||
Temperature Drift | ||||
Compensation temperature | 0~70℃,≤35kPa; -10~80℃,>35kPa | |||
Temperature drift of zero point | ±1.0%FS (Within compensation temperature) | |||
Temperature drift of full scale | ±1.0%FS (Within compensation temperature) | |||