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HPM18LV 0-10V Capacitance Absolute Vaccum Pressure Transmitter KF, CF, And VCR Connector

Datasheet Download:
HPM18LV Capacitance Vacuum Gauge - V26.1.0.pdf

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Overview

HPM18LV is a capacitive vacuum gauge, also known as a capacitive thin-film vacuum gauge (CDG). This product uses a ceramic capacitive sensor as its sensing element and directly measures pressure via a vacuum connection. Its 0-10 VDC analog output signal is proportional to the measured pressure and is unaffected by the type and composition of the process gas. Ceramic materials possess high elasticity, wear resistance, corrosion resistance, and rapid heat dissipation, giving this vacuum gauge excellent thermal stability and low temperature drift.

Application

Vacuum application
Laboratory and research and development+
Semiconductor industry
Vacuum packaging
Plasma etching process equipment

Features

Capacitive thin-film principle
High precision and good stability
Excellent overload resistance
Detection is unaffected by gas type and composition
Fast response and low hysteresis
Direct pressure measurement: analog output signal is proportional to the measured pressure
Supports various pressure interfaces in the vacuum industry, such as KF, CF, and VCR

Description

Technical Parameters

Overview

HPM18LV is a capacitive vacuum gauge, also known as a capacitive thin-film vacuum gauge (CDG). This product uses a ceramic capacitive sensor as its sensing element and directly measures pressure via a vacuum connection. Its 0-10 VDC analog output signal is proportional to the measured pressure and is unaffected by the type and composition of the process gas. Ceramic materials possess high elasticity, wear resistance, corrosion resistance, and rapid heat dissipation, giving this vacuum gauge excellent thermal stability and low temperature drift.

Application

Vacuum application
Laboratory and research and development+
Semiconductor industry
Vacuum packaging
Plasma etching process equipment

Features

Capacitive thin-film principle
High precision and good stability
Excellent overload resistance
Detection is unaffected by gas type and composition
Fast response and low hysteresis
Direct pressure measurement: analog output signal is proportional to the measured pressure
Supports various pressure interfaces in the vacuum industry, such as KF, CF, and VCR

Measuring Range
Absolute (kPa)	Rated pressure	0.2	0.5	1	2	5	10	20	100
	Overload	350	350	350	350	400	400	600	1000
Absolute (Torr)	Rated pressure	2	5	10	20	50	100	200	1000
	Overload	2600	2600	2600	2600	3000	3000	4500	7500
Absolute (mbar)	Rated pressure	2	5	10	20	50	100	200	1000
	Overload	3500	3500	3500	3500	4000	4000	6000	10000
Note: For other measuring ranges, please contact us.
Measuring Medium
Type		Various gases compatible with contact materials
Output Signal/Power Supply
Standard		0~10VDC /Vs=12~30 V_DC
Performance
Accuracy		±0.1%FS (20kPa,100kPa) ±0.25%FS (5kPa,10kPa) ±0.5%FS (500Pa,1kPa,2KPa) ±1.5%FS (200Pa)
Long-term stability		±0.50%FS/year, ≤1kPa ±0.25%FS/year, >1kPa
*Accuracy complies with IEC 60770 (non-linearity, hysteresis, repeatability)
Environmental Conditions
Temperature range		Working temperature: -40~125℃ (max 120min on +125°C) Ambient temperature: -30~85℃ Storage temperature: -30~85℃
Protection grade		IP40
Temperature Drift
Compensation temperature		-20~80℃
Temperature drift of the zero point		±1.5%FS (Within compensation temperature)
Temperature drift of full scale		±1.5%FS (Within compensation temperature)
Electrical Protection
Short circuit protection		Support
Reverse polarity protection		No damage, the circuit does not work
Mechanical stability
Vibration		20g(20~5000Hz)
Impact resistance		50g(11ms)
Insulation
Insulation resistance		>200MΩ @500VDC
Dielectric strength		<2mA 500VAC 1min